Detection and metrology integrated in a single system obtains a precise, stable measurement of a wide range of shapes and materials, providing improved cost effective solution.
Innovative image acquisition technology to achieve better detection capabilities.
Detection of defects and miss-processes complemented with in-depth metrology: Reliable and quantitative analysis of voids, missing layers and features.
Innovative image acquisition technology to achieve better detection capabilities.
Detection of defects and miss-processes complemented with in-depth metrology: Reliable and quantitative analysis of voids, missing layers and features.
- Measurement of bump dimensions and precise location
- Inspection of surface defects for a wider range of configurations
- Detection of voids by obtaining 3D volume, elemental volume and composition
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