Products & Technologies
2D Microscope
Optical features used for efficient geometrical inspection purposes.
Overview
XwinSys has pioneered a hybrid approach to meet complex 3D structures in the semiconductor industry. Combining 3D optics with XRF enables a single measurement to achieve full inspection. Furthermore, the spot size of both analytical techniques is small enough to facilitate monitoring of localized features.
2D Microscope & Image Processing
The main importance of the 2D microscope is its advanced optical features, mainly used for efficient geometrical inspection purposes, as well as an accurate navigation tool. The high level of image processing and pattern recognition allows defect inspection, color inspection, feature dimension, centralization feature, contour extraction and more.Technical Specifications
| System Parameters | Specifications | Comments |
| 2D Microscope | Resolution: 5 Megapixel, lateral 0.1 µm | Sub-micron navigation with pattern recognition |
| Magnification (optical microscope) | X2, X10 | Option: X20, X50 and other |
Applications
The unique triple-mode technology offers several film stack critical parameters measurements and quantities
Elemental analysis of low Z elements is performed with a state-of-the-art light elements detector
Analysis of multi-stack structures and thick mono-layers
The hybrid solution provides quick and reliable location of bump and wafer defects
Integrated 3D and 2D metrology and inspection in a single system
| 
