XwinSys Solutions

Light Elements Detection

Elemental analysis of low Z elements is performed with a state-of-the-art light elements detector.

Elemental analysis of low Z elements is performed with a state-of-the-art light elements detector. These elements represent the evolving trend of the organic elements penetrating the semiconductor industry, mainly suitable for applications such as glass substrate photo-resist, isolators and more.

These elements are invisible and/or overlapped with other elements in the sample, when analyzed with other systems. This feature opens a wide range of capabilities, both in-line and off-line, for many semiconductors applications, enabling:  
  • Analysis of light (low energy) elements such as Magnesium, Fluorine, Oxygen, Nitrogen and Carbon
  • Efficient analysis of dozens of other elements by detecting its low level readings
Light Elements Detection

Compatible Systems

Onyx
In-line non-destructive inspection and metrology for the semiconductor and micro-electronic industries.
Agate
Non-destructive inspection and metrology for the semiconductor and micro-electronic industries.